FOUP Load Port "TAS450"
The load port is moving to a new stage. The movable parts have a structure that enhances particle performance.
The "TAS450" is a standard load port designed to automatically open and close FOUPs (Front Opening Unified Pods) used in semiconductor manufacturing processes, and it can be installed on various semiconductor manufacturing equipment. It offers top-class performance in terms of low particle generation and high throughput, which are required by semiconductor manufacturing equipment. 【Features】 ■ SEMI Standard E154 ■ All moving parts, including the mapping unit, are located below the wafer surface, enhancing particle performance ■ Mapping unit (transmissive sensor) can be optionally installed ■ Equipped with obstacle detection functionality during FOUP docking ■ Equipped with FOUP presence detection and proper placement detection functionality when FOUP is loaded *For more details, please refer to the PDF document or feel free to contact us.
- Company：TDK テクニカルセンター
- Price：Other
